LED Status Indication During Semiconductor Manufacturing
TL30 Basic tower lights give eye-friendly guidance for staff working in close vicinity to single wafer deposition machines
The status of FOUPs (Front Opening Unified Pods) in single wafer deposition machines must be monitored in order to advance efficiency and output. Tower lights are a common solution to this challenge, as they provide easy, real-time indication of the FOUPs’ status. However, staff members that work daily alongside these FOUPs are at risk. Extended exposure to harsh tower lighting can cause eye strain, which can quickly lead to fatigue, and, consequently, loss of productivity. Banner’s TL30 Basic tower lights respond to this challenge with easy-to-read indication that is comfortable for the eye.
Your Benefits
- TL30 Basic tower lights save space, due to a thin 30 mm cylindrical body that fits comfortably in areas where larger tower lights may interfere with movement
- Higher cost efficiency with rugged IP65 and IK07-rated housing and LED lights to ensure long-term, maintenance-free operation
- Light that is comfortable on the eyes in applications where staff may work in very close proximity to a tower light over a prolonged period
Status Indication: Integral, but Challenging
In the process that fabricates a semiconductor device, the deposition is simply one step of many. In the time between these steps, silicon wafers are placed in FOUPs to ensure that they are stored in a controlled environment for transport. More than one FOUP can be loaded into a single wafer deposition machine at the same time. After the wafers have been processed and re-stored in the FOUP, that FOUP can be removed and replaced with a new one.
Giving the staff that work in the clean room a clear indication of each FOUP’s status improves the efficiency at which they can work and increase output.
Tower Lights That Work for Everyone
Eye strain caused by proximity to bright tower lights is a legitimate risk with this type of indication, and can cause staff fatigue, increased errors, and a loss of productivity. The TL30 Basic tower lights prioritize easy-to-see status indication, but its design ensures a balance in the level of light so it is comfortable, not straining, to the human eye. This balance allows staff to work near one or many tower lights for long periods of time without experiencing discomfort.
Colors Correspond to Process Stages
Installed above each FOUP that has been placed into the single wafer deposition machine, the TL30 indicates the status of the FOUP by lighting up in a particular color that corresponds to that stage in the process. This indication is immediate, at-a-glance communication of the status of the FOUP. When a step has been completed, the TL30 shines grey to avoid any false perception of indication caused by ambient light. Once the TL30 illuminates its green segment, the FOUP can be taken out and a new one put into the wafer deposition machine.
Further Information
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- Assembly Management with a Direct MES Connection
- Car Body Identification in Automobile Production
- Reliable Skid Detection in Automotive Production
- Error-free JIS Order Picking for Bumpers
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- Cloud-based Level Monitoring
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- Body Shop – Welding Nut Detection
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- Item-level Detection with UHF RFID
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- Press Shop: Controlling hydraulic pressure
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- Manual Load Weld Cell
- Detecting Black Parts on Black Door Panel
- Moonroof Detection
- Long-Range Inspection in Automotive Assembly
- Rubber Washer Detection on Engine Block
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- RFID in Engine Production
- Bumper Production with Identification
- Solutions for Paint Shops
- Welding and Assembly Sensors
- Angle Sensors for Assembly Systems
- Tool Identification
- Pick-to-Light for Bumper Assembly
- RFID Identification of Injector Nozzles
- RFID in the Body Shop
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- Condition Monitoring of Control Cabinets
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- Success Stories
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- Reliable Linear Position Detection in Ex Zone 22
- Decentralized Control Modules in Coldstore
- Track and Trace in Meat Production with RFID
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- UHF RFID in Food Distribution Center
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- Distributed I/O for Food Equipment
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- IP67 Power Supplies for Conveyors
- Identification in Food Product Storage
- Bottle Detection with Camera
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- Height Control and 3D Spatial Monitoring on Autonomous Forklift Trucks
- Decentralized Control of Conveyor Modules
- Tracking Big Bags with RFID
- Distance Detection in Container Cranes
- Access Control for Protected Areas
- Decentralized Muting of Electro-sensitive Protective Equipment
- I/O Blocks Control Roller Conveyor Modules
- Container Check
- Fast Tag Detection at Warehouse Gates
- Item-level Detection with UHF RFID
- Preventive Maintenance on Conveyor Belts
- Detection of Transport Containers
- Level Detection in Vessels
- Identification of Cryovessels
- Identification of Mobile Containers with Handheld Devices
- Identification of Food Containers
- Tier 1 – Bumper Identification
- Condition Monitoring in Storage Rooms
- Collision Protection on Reach Stackers
- Success Stories
- Logistics: RFID Reduces Error Quota by 99 Percent
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- I/O and Safety Modules Increase Throughput in Intralogistics
- Shipment Tracking for Raw Materials
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- RFID-based Tracking of Inbound and Outbound Materials
- Decentralized UHF RFID Solution
- Contact-free Encoder in Potato Production
- Decentralized Control Modules in Coldstore
- Speed Control via Radar Sensor QT50
- IP67 Power Supplies for Conveyors
- Modular Conveyor System
- RFID Solution for Warehouse
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- UHF RFID in Food Distribution Center
- Autonomous Parking Assistance for Trucks
- Mobile Equipment
- Animal and Object Detection on the Combine Harvester
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- Automatic Slope Compensation
- Distribution Lines for Field Sprayers
- Angle Measurement on a Field Sprayer
- Material Flow Monitoring on a Combine Harvester
- Determining the Boom Angle Position
- Equipment Compartment Illumination on Fire Engines
- Two-Axis Tilt Measurement on a Combine Harvester
- Collision Protection on Reach Stackers
- Success Stories
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- Selective Asparagus Harvester
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- Speed Control via Radar Sensor QT50
- RFID Guides AGV in Suspension Production
- Block I/O Modules on Super Yacht
- Wear-free Encoder on Hopper Dredger
- I/O for Dust Suppression
- Cabinet Cooling
- Quick Disconnect Connectivity
- Automation Solutions for Extreme Cold
- Remote I/O for Cranes
- Rugged Heavy Metal Lifting
- Rollercoaster Positioning
- Mobile Machinery Solutions
- Exact Height Positioning
- Critical Angle Sensing
- Angle Sensor Detects Platform Lift
- Oil and Gas
- Packaging
- Decentralized RFID Package Verification
- Identification of Printing Color Cartridges
- Reliable Operation of Machines
- Container Check
- Monitoring of Caps in Filling Lines
- Monitoring Changeover Processes
- Identification of Test Bottles
- Level Monitoring of Ground Coffee
- Level Detection in Vessels
- Detection of Transport Containers
- Success Stories
- Pharma
- End-to-End Sample Tracking with RFID
- RFID Control of Tube Connections in the Ex Area
- Decentralized Package Verification
- Automate Modular Skids
- Pharmaceutical Skids with Decentralized I/O Technology
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- Control of Valve Interfaces
- Monitoring of Quarter Turn Actuators
- Detection of Pipe Elbows
- Remote Signal I/O
- Planning and Construction of Super Skids
- Easy Connection of Field Devices
- Identification of Cryovessels
- Identification of Mobile Containers
- Identification of Mobile Containers with Handheld Devices
- Securing Hose Connections for Preliminary Products
- Identification of Hose Connections in Sterile Areas
- Identification of Hose Connections in Ex Zone 1
- Identification of Big Bags and Bioreactors
- Identification of Single-Use Applications
- Success Stories
- Semiconductor
- Electronic Marking Verification
- Counting Integrated Circuits
- Inspection of Two Barcodes
- Compact Safety Control
- Safeguarding Small Access Points
- Adhesive Detection on PCB Assembly
- Great Detail Inspection for Mobile Electronic Devices
- Error Proofing for IC Chips loaded into Pocket Tape
- Presence and Orientation of IC Chips Seated in Nests
- Detection of Hard Disks
- Multiproduct Light-Guided Assembly Station
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- Safeguarding Small Access Points
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